Electron Beam Lab

Our Electron Beam Lab features five electron beam units with 300,000X capability, energy dispersive X-ray spectroscopy, and a quantitative image feature analyzer.  Thin film and surface characterization by scanning auger spectroscopy is available including sputter etch profiling for elemental composition at various depths.  Wave dispersive X-ray spectroscopy is performed down to the ppm level.

Analysis by SEM provides a unique depth of field advantage over optical microscopes, allowing the user to focus on irregular fracture surfaces.  When combined with the decades of experience of our operators, the MES E-Beam lab provides a powerful and effective failure analysis technique.       

Our primary electron beam testing instrumentation includes the following:

• JEOL 6100 Scanning Electron Microscope
• JEOL 5800 Scanning Electron Microscope with Oxford Energy Dispersive X-Ray
• JEOL JXA-733 Superprobe with Wavelength Dispersive X-Ray
• JEOL JSM-T330A Scanning Electron Microscope with IMIX-IIB Energy Dispersive X-Ray
• JEOL JAMP 10 Auger Spectrograph
• JEOL JAMP 10S Auger Spectrograph